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In this study, in order to enhance the accuracy of temperature measurement of micro heaters in micro-platform of micro gas sensors, the Pt T sensors were designed, fabricated, and characterized in micro-platform.
Also, more exact temperature monitoring of micro heaters in MEMS gas sensors using by micro Pt thin film temperature sensors (briefly, Pt T sensors) in the micro-platform of micro gas sensors is needed.
To investigate temperature difference between T1 and T2 owing to 20 μm physical gap, we characterized the electrical resistance change of the Pt micro heaters in the temperature oven.
Measurement of the electrical resistance change of both Pt T sensors and micro heaters in the temperature oven (SU201, Espec, Japan) as a function of temperature from 25 to 150 °C.
In order to measure and control the temperature of the micro gas sensors with input power, we carried out the procedures which consisted of the following four steps: (1) Measurement of the electrical resistance change of both Pt T sensors and micro heaters in the temperature oven (SU201, Espec, Japan) as a function of temperature from 25 to 150 °C.
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Check the product specifications for the square feet a portable heater is rated for in order to maximize heater safety.
3, (3)where R2 = the electrical resistance of the micro heater in temperature oven, T2 = temperature of the Pt micro heater.
As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors.
Feasibility of implementing the designed micro-heaters in a real chip is discussed based on the analysis.
The reason why it is difficult to determine the exact emissivity of IR camera is that other materials exist surrounding micro heater layer in the micro gas sensor as reported in [8, 9] and the emissivity is affected by not only the kinds of materials but also morphologies of surfaces and shapes of materials [10].
We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating.
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