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A Pt thin film was used as micro heaters and temperature sensor materials.
Experimental procedures consisted of micro gas sensor design and fabrication, electrical resistance measurement of micro heaters and Pt T sensors.
Measurement of the electrical resistance of micro heaters and Pt T sensors by Joule heating with various input power of a DC power supply from 1 to 15 mW.
Micro gas sensors with micro-platforms, which consist of micro heaters and sensing electrodes on the membranes, have been actively researched, due to the possibility to miniaturize sensors and reduce power consumptions [1 4].
(4) Calibration of the results from (1) and (2) above in order to measure and control the temperature of the micro heaters and compare with the result from (3). .
In the case of the contact type of temperature sensors, it is also hard to measure the operating temperature of micro gas sensors with membranes due to the fracture problem from fragile structures of membranes and thermal conductivity problem between the micro heaters and contact type temperature sensors.
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The accelerometer consists of a micro heater and two temperature sensors which measure the gas temperature difference between two symmetrical positions on both sides of the micro heater.
In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2 = 6.466R1 642.8, where T2 = temperature of the Pt micro heater and R1 = the electrical resistance of the Pt T sensor.
The temperature of the Pt micro heater and an IR camera showed the almost same degree of linearity For the comparison with measurement results from an IR camera, the temperature of the Pt micro heater was measured by an IR camera (T420, FLIR, USA, emissivity = 0.5).
Fig. 1 a A design of a micro gas sensor that consists of Pt T sensor, b an optical microscope image of the micro Pt thin film temperature sensor with the micro heater and the electrode on the membrane in the fabricated micro gas sensor.
In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation between the Pt T sensor and the working temperature, which was linear proportional relation expressed as the equation: T2 = 6.466R1 642.8, where T2 = temperature of the Pt micro heater and R1 = the electrical resistance of the Pt T sensor.
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