In both data, the operating temperature of the micro heater was positively correlated with the heater voltage.
In order to reduce the processing complicacy, the temperature sensor and the micro heater were fabricated with chromium metal film.
The resistance of the temperature detector (RTD) and the power consumption of the micro heater were measured and calculated.
In order to rapidly increase temperature of the micro dryer, a micro heater was fabricated on the backside of the micro dryer.
The temperature of the Pt micro heater and an IR camera showed the almost same degree of linearity For the comparison with measurement results from an IR camera, the temperature of the Pt micro heater was measured by an IR camera (T420, FLIR, USA, emissivity = 0.5).
The micro heaters are designed and fabricated by combining laser milling techniques, and conductive ceramic technology.
MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators.
These results measured by micro heaters were well agreement with the IR camera results.
The electrical resistance of the Pt micro heaters were 131 and 174 Ω at 2 and 15 mW, respectively.
Micro heaters are necessary for elevated temperatures to operate micro gas sensors [5], because most of gas sensors need thermal energy to react gases [6, 7].
