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The resonant frequencies of the Si mechanical resonators are calculated within a mean absolute percentage error of 3% from the FEA results.
The fabrication was "quite challenging because the mechanical resonators are essentially three-dimensional structures... and qubits are wires on silicon chips, and they're very flat," O'Connell says.
The fabricated Si mechanical resonators are different from an ideal clamped clamped beam due to undercuts of the insulator layer under the anchors.
Miniaturized mechanical resonators are enabling a remarkably large and diverse set of applications ranging from sensing, timing, and signal processing to scanning probe microscopy and precision measurements for fundamental studies in several fields of engineering and science.
Mechanical resonators are a key component of mechanical filters.
Mechanical resonators are analogous to electrical LC circuits consisting of inductance and capacitance.
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The detailed fabrication of these mechanical resonators is presented as follows.
The resonant frequency of each Si mechanical resonator is analyzed by the FEA model taking into account the effect of the undercuts.
The resulting mechanical resonator is shown in Figure 3a.
The mechanical resonator is designed as a suspended plate using Lorentz force excitation and movement induction detection.
The mechanical resonator is designed as a suspended plate using electrodynamic Lorentz force excitation and movement induction detection.
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