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To calculate the final error for the template, the maximum placement error is used among all placeholders of the template.
The pagination algorithm then uses this error to find the solution that is the global minimum, effectively minimizing the maximum placement error.
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In electron-beam lithography, charging on the photoresist usually causes image distortion and placement error.
The average placement error of normal needle insertion was 5.6 mm.
Figure 7 also shows a tendency for reduced placement error with smaller preloading probe diameters.
Overall, the concave preloading probe described in this study decreased needle placement error.
The average placement error with normal needle insertion was 3.4 mm.
These results suggest a tendency for reduced placement error with larger preloading probes.
The average placement error was 0.50 mm, which was approximately 15% of the error with normal insertion.
Once an interval [i,…,j] of elements has been selected for placement, it is necessary to map this interval to the candidate template and measure the placement error.
Table 5 Relative uncertainty on Y measurements due to placement tolerances of strain gauges Placement error Uncertainty % Max Min Mean Radial error Δr 1.02 0.28 0.57 Tangential error Δε 0.88 0.12 0.42 Inclination angle Δα 0.60 −1.45 0.86 Total 2.54 −1.05 0.2.54
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