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The maximum chamber pressure achieved was restricted to 55 bar absolute, due to a conservative approach in the test programme dictated by the uncertainty in heat transfer to the pintle.
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With laser cavity ignition, the chamber pressure increases relatively rapidly and higher maximum pressure can be achieved.
When the maximum dry layer resistance was modified under the assumption that the chamber pressure is zero, the modified dry layer resistance, which is defined as specific dry layer resistance, correlated well with the sublimation rate.
When the chamber pressure was kept at 10 Torr, the lowest full width at half-maximum of ZnO (002) of 175 arc second can be obtained.
To control chamber pressures, vacuum pumps decreased the chamber pressure while nitrogen tanks increased the chamber pressure.
The maximum etch rate of the BST films was 45 nm/min under the following conditions: gas-mixing ratio of CF4/(CF4+Ar)=0.2, RF-power of 700 W, d.c.-bias voltage of −200 V and chamber pressure of 15 mTorr.
Experimental performance tests were conducted while measuring the microthruster chamber pressure, chamber temperature, and surface temperatures.
Test chamber pressure = 300 600 psig.
The chamber pressure was approximately 1 Pa.
The chamber pressure is 3 × 10−2 Pa.
The chamber pressure was 2 × 10−5 Torr.
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