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The dielectric constant of the film was calculated using the maximum accumulation capacitance obtained by C-V curves.
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Samples S1~S4 have very close accumulation capacitance.
The accumulation capacitance value is 410 pF below 100 Hz.
Here, the relative capacitance C/C acc (practical capacitance value versus its accumulation capacitance) was chosen as y-axis in order to compare the different samples.
Compared to the as-deposited samples, the annealed samples show pronounced accumulation capacitance reduction.
The C-V curves were normalized to their respective accumulation capacitance.
The reference voltage (Vr) was measured at 50%% of accumulation capacitance.
Moreover, it is found that the value of accumulation capacitance is inversely proportional to the frequency.
For sample D, pure La2O3 film, it has the smallest accumulation capacitance.
The accumulation capacitance evidently increases from the original 1.92 to 2.25 μF/cm2 after PDA.
However, sample D has a large value of accumulation capacitance compared with the other samples before and after annealing.
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