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(a) Nanoholes in anodic aluminum oxide master mold and (b) nanopillars in NOA63 replica mold.

The method presented in this paper includes a two-fold replication of a master mold and additionally a final transfer print.

The output from this research is a new design model, mould as master mold, and biscuit prototype of item CNN plate diameter 220 mm that have rolledge shape.

This mixture was poured onto the master mold and degassed for 20 min prior to curing on a hot plate at 120°C for 2 h (Figure 1a,b [22 24].

The limitations of nanoimprint lithography in SERS applications have been the high fabrication costs associated with the master mold and the limited resolution at which few nm gap structures may be generated.

As a result, we have succeeded in fabricating a reduced-size replica mold, which is almost half again the density of the master mold, and confirmed UV nanoimprint replication with the reduced-size mold.

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To verify this, we took SEM images of the master mold after PDMS filling and demolding, which revealed no PDMS left behind on the master mold.

With regard to the fixed-focal-length micro-lenses, the profile of the micro-lens curve can be formed by the defined master mold with specific temperatures and pressures.

quartz master mold with 250-nm-wide and 150-nm-long lines separated by 550-nm space was fabricated by laser interference lithography and RIE.

In some cases such as in [30], an imprint replica of the master mold is first obtained using nanoimprint lithography (step-and-repeat technique) onto a resist-coated wafer, where a nickel layer is then deposited onto the imprint and peeled off to be used as the flexible mold in the imprint process published in [42].

The suction cup was fabricated using PDMS and a 3D-printed master mold (Fig. 1).

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