Unlike parametric resonance in the linear case, the jumps (very critical for mass sensor application) from large response to zero happen at additional frequencies other than at the boundary of instability area.
In cantilever-based sensor applications, the use of higher vibrational modes provides increased mass sensitivity [8] and allows the elastic properties [9] and the position of adsorbates [10] to be disentangled.
Mastromatteo et al. reported a highly sensitive mass sensor based on AlN/Si FBAR for artificial olfactory and bio-sensing application [13].
Even though graphene resonator has recently been extensively considered as a NEMS device for its applications in actuation, it has been barely employed as a mass sensor that enables highly sensitive atomic detection (e.g., measurement of atomic weight).
The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.
As a mass sensor, temperature sensor, pressure sensor, particle detector, etc., the FBAR is quite attractive.
Similar tuning is required for battery and sensor applications.
Jensen, K., Kim, K. & Zettl, A. An atomic-resolution nanomechanical mass sensor.
Chaste, J. et al. A nanomechanical mass sensor with yoctogram resolution.
Yoshimura, K., Langhammer, C. & Dam, B. Metal hydrides for smart window and sensor applications.
