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Similarly to the as-etched samples, a thicker LPL leads to a lower-strained stack, but strains equalize for longer annealing times.
Changes in texture upon the growth of thicker TiN films (>1µm thickness) have been observed in other studies and have been related to strain energy minimization, with lower-strained grains growing at the expense of those more highly strained [30, 31].
To conclude, in case of double layer of PSi, a thicker LPL should be preferred for growing lower-strained stacks, and the interaction between the various stack components should be taken into account.
A trade-off between these effects, of lower-strained stack and rougher seed, is required for finding the optimum condition for a better seed template for higher quality epitaxial growth.
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