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IBE is a physical etching process using Ar gas as the ion source, and it has the advantages of human safety, anisotropic etching, and less line width loss when the feature size is less than 1 μm [24 29].
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If the transverse slope of curved lines is less and line width is more than a limit value, the wear rate decreases [9].
Fine line patterns on PMMA with line width less than 60 nm were obtained under optimized lithographic conditions.
Both lasers generate optical pulse widths of less than 35 ps, corresponding to a CARS excitation line width of less than 0.5 cm−1.
The sheet resistance are less than 30 and 10 Ω/sq for erbium-silicide and platinum-silicide, even if the line width is less than 100 nm.
With these materials, a line width of less than 0.25 microns (millionths of a metre) becomes increasingly difficult and costly to make.
Magnetic field homogeneity was adjusted by shimming on the tissue H2O signal to reach a line width of less than 70 Hz (0.4 ppm).
The maximum spectral resolution of the system is given by the CARS excitation line width of less than 0.5 cm−1 and the matching minimal tuning step of 0.4 cm−1.
The line width of our laser is less than 2 cm–1, and unlike FT-IR systems, the spectral resolving power does not diminish with scan time.
Beamline energy resolution was controlled at much less than the U LIII- or LII-edge line width (8.67 eV) using vertical slits.
The MRS scan was initiated if the line width reported by the prescan process was less than 6 Hz.
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