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A large proof mass with through wafer thickness (560 μm) is fabricated in this process.
The developed process is particularly useful for inertial sensors that benefit from a large proof mass, for example accelerometers and gyroscopes.
ICP process, which can generate large proof mass, is used for the first time to fabricate an out-of-plane tunneling accelerometer.
In the work described here, the process is demonstrated for the full wafer release of a high performance accelerometer with a large proof mass measuring 4 × 7 mm2.
Compared to many previous studies, including a relatively large proof of concept study of metyrapone augmentation of conventional antidepressants [ 33], the ADD study is recruiting from a broad population of patients including those from both primary and secondary care.
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Furthermore, we showed, through a large proof-of-principle experiment, that weekly releases of OX3097D-Bol males into stable populations of caged wild-type olive fly could cause rapid population collapse and eventual eradication.
Thus, despite its limitations, this study provides supportive evidence to pursue additional studies of lebrikizumab as a potential novel therapeutic agent in asthma prior to embarking on large proof-of-concept studies.
Similar tools incorporated into an integrated proof environment (IPE) would assist proof developers in understanding and manipulating the increasingly larger proofs that are being developed.
As (Bundy 2011) puts it: "As important theorems requiring larger and larger proofs emerge, mathematics faces a dilemma: ether these theorems must be ignored or computers must be used to assist with their proofs".
We suggest new approaches to decrease risk of harm in pivotal Phase III RCTs in the critically ill including better surrogate endpoints in POP/Phase II RCTs to more accurately predict success in pivotal/Phase III RCTs, larger proof-of-principle/Phase II RCTs and use of response adaptive trial design in Phases II and III.
5 Put the chocolate into a large, heat- proof bowl, then pour the cream into a pan and put on a medium heat until it starts to bubble.
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