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Bayard-Alpert hot-filament ionization gauge.
This ion source is a penning ionization gauge type source.
The theory and design of subminiature ionization gauge tubes of the Bayard Alpert type is discussed.
In this ionization gauge, the cross section of the collector is reduced to minimum to reduce the X-ray effect.
Subminiature ionization gauge tubes offer advantages in reduced size, weight and power requirements over conventional tubes of this type.
An ionization gauge detects the pressure by measuring the collected ion current that can be affected by the presence of an externally sustained plasma in the vacuum chamber.
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Operating principles are the same as for the other ionization gauges described above.
The pressure is generally monitored using thermal gauges at low vacuum and ionization gauges at high vacuum.
A gauge sensitivity of 0.05 Pa−1 has been achieved under 100 μA emission current for nitrogen, comparable with 0.07 Pa−1 of commercial ionization gauges.
Commercial hot filament ionization gauges of Bayard Alpert type can be used for the pressure measurement usually below the upper pressure limit of 10−2 mbar.
To our knowledge, this is the lowest lower pressure measurement limit reached in the reports for the CNT field emission ionization gauges.
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