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Ions were implanted by metal plasma ion implantation.
plasma immersion ion implantation.
–John Macdougall and Ken Manchester, ion implantation.
The structure resulting from deuterium ion implantation shows stability against the action of deuterium ion implantation.
Ion implantation was provided with N5+ ions.
Different ion implantation setups will be reviewed.
Fig. 1 shows the schematic of ion implantation system.
Ultrathin MoS2 limits the doping methods (ion implantation, etc).
In this method, the position of ion implantation becomes steerable.
After ion implantation, the PL lifetime of the material decreased.
Eventually, B is introduced by low energy ion implantation.
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