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In the strong inversion regime, the device behavior is dominated by the inversion charge, allowing a 1D analysis.
As the upper-corner angle decreased from obtuse to acute angle, we observed an increased amount of inversion charge using split-CV measurement.
Although normalized inversion charge density was the largest with acute angles, effective carrier mobility with acute upper-corner angle was severely degraded.
A detailed analytical modeling of inversion charge for this novel structure has been presented based on the self-consistent solution of 2D Poisson's equation and 1D Schrödinger equation.
The conductivity-effective electron mass, the inversion charge centroid and the mobility, including the most important scattering mechanisms for these devices, are simulated and modelled.
An accurate charge-based compact MOSFET model is developed using the third order Hermite interpolation polynomial to approximate the relation between surface potential and inversion charge in the channel.
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Compared with the previous charge-based models with an assumption of the linearization of the bulk and inversion charges with respect to the surface potential at a fixed gate bias, the BSIM5 model is directly derived from the solution of the Poisson equation coupled to the current density equation.
The simulation, however, shows that even for a short-channel BioFET, uniform distribution of inversion charges is more important.
The inversions charge in the Stern layer can be induced depending on the chemical environmental of the solutions (Viallis-Terrise et al. 2001).
In this model, the inversion layer charge is obtained considering quantum mechanical (QM) effects.
The threshold voltage expression is developed using inversion carrier charge sheet density method.
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