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The gas pressure inside the deposition chamber was maintained at 500 mTorr during the deposition.
The temperature field inside the deposition cell is well defined and easily modeled.
power was applied using a dielectric-encapsulated coil antenna installed inside the deposition chamber.
For ICP generation, the RF power was applied to a dielectric encapsulated RFI antenna installed inside the deposition chamber.
We verified that the reaction mechanism of Cu2O occurred in the solution phase, and Cu2O transformed into Cu in the solid phase inside the deposition films.
Before each deposition the SiO2 glass substrate was cleaned with ethanol in ultrasonic bath for 10 min and then placed inside the deposition chamber parallel with the target at 4 cm distance.
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The bond between the splats inside the depositions and layer structure of coatings is the factor which defines the features of coatings achieved by the plasma spray method [7].
The deposition inside the gap was studied to identify the contributions of ions and charge exchange neutrals.
During sputter deposition, stress is generated inside the deposited film.
(Read the deposition to get an inside look at how a foreclosure mill operates).
The distribution of the plasma species inside the trench influenced to the deposition rate.
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