Exact(9)
Plastic flow increased with increasing imprint temperature.
The plastic flow increased with increasing imprint temperature.
The plastic flow was good so a lower loading force was required when the imprint temperature increased.
The imprint temperature will then be lowered below the Tg of the resist to solidify the resist, before the mold is lifted.
The nanopattern formation and physical mechanism were investigated on metal film imprint by changing the imprint temperature, imprint velocity [14], and stamp taper angle [10, 15].
The effect of the roller tooth's taper angle, imprint depth, imprint temperature, and imprint direction on the imprint force, adhesion, stress distribution, and strain are investigated.
Similar(51)
It is therefore concluded that imprinting parameters can be optimized by increasing imprinting temperature, extending imprinting time and decreasing demolding temperature while the smallest and the thinnest initial resist thickness are selected.
Figure 9c, d show the slip vector distribution at the imprint temperatures of 400 K and 500 K, respectively.
Lower imprinting pressures (10 bar) or lower imprinting temperatures (90°CC) result in a weaker flow of polymer and therefore less change in the colors.
Although electron beam and nano-imprint lithography techniques have been widely studied, there are issues with regard to the damage to structures caused by high-energy electron beams or high imprinting temperatures [8].
Compared with the room temperature imprint of Fig. 9b, a higher magnitude of the slip vector behavior was found when the temperature increased.
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