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Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications.
While having high quality factors (>106) superconducting cavities do not permit magnetic field control of qubits.
Two high quality factors of Fano resonances with effective dephasing time are simultaneously achieved at spectrum.
Typical requirements include low area consumption, large specific capacitance, low capacitance tolerances, high quality factors and low parasitic substrate coupling.
The resonator achieves high quality factors (>10,000) and higher transmissions (>−20 dB) simultaneously in 50 Ω measurement.
Silicon-based suspended microstructures with high quality factors can be applied for frequency-sensitive systems such as accelerometer and gyroscope integrated with electronic systems [18, 19].
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It has a relatively high quality factor of 35.
However, filters with high quality factor must be implemented.
A high quality factor (Q-factor) is one of the major requirements of high-performance resonators.
This mechanism gives to resonating structures with a high quality factor (Q factor).
In this paper a flexible coplanar waveguide resonator with high quality factor is proposed and fabricated.
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