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The layers were deposited with very high deposition rates between 40 and 70 nm/s.
However, the high deposition rate also results in dark deposits.
Often stoichiometric films can only be deposited in this unstable transition mode at high deposition rates.
The deposits showed fairly strong (0 1 2) crystallographic texture at high deposition overpotentials.
Tsuchida, H. et al. Characterization of 4H-SiC epilayers grown at a high deposition rate.
Additionally, high deposition rates can cause the inhibition of nitrate reductase, reducing NO3− assimilation27,33,34.
At the high deposition site, uptake of organic nitrogen was higher than uptake of inorganic nitrogen.
Very high deposition rates were obtained.
Additionally, the process parameters were optimized towards high deposition rate.
Many reactive sputter deposition applications require high deposition rates.
Moreover, high deposition rate of 110 nm/min is obtained.
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