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Mungekar, H. P. & Lee, Y. S. High density plasma chemical vapor deposition gap-fill mechanisms.
In our group a linear high density plasma generator was built in 2012.
The integrated setup includes the liquid lithium circulating part and linear high density plasma generator.
An increase of implantation current density in front of high density plasma region is observed.
The region of low coherency seemed to coincide with region of high density plasma.
High density plasma assisted sputtering source (HiPASS) has been introduced to develop a remote plasma sputtering.
Similar(39)
(a) Two high-density plasma discharges are shown.
(b) Two high-density plasma discharges performed in the high Te_outer regime are shown.
FTU tools allow comparable high-density plasma regimes to be exploited with different electron temperatures at the plasma periphery.
For example, in broadening our semiconductor equipment line, we would like to make a high-density plasma coating system.
High-density plasma flowing in these plasma-jet channels is generated inside the nozzles.
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