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Moreover, the high elasticity of PDMS actuator enables the high actuator displacement [18],[18].
The developed CMG enables to combine high actuator output torque with a low micro-vibration signature.
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In combination with a higher actuator stiffness compared to the conventional actuator the output work that can be obtained is significantly increased at the expense of only a slightly larger chip area.
If a 37-element segmented mirror design works reasonably well, then the prospects are good for better performance with a MEMS segmented DM that has higher actuator counts.
A protocol for characterizing a novel light-weight actuator with high actuating capability is proposed and analyzed in this paper.
This paper describes the design and ANSYS modeling of a bidirectional thermal inchworm MEMS actuator featuring high actuation resolution (0.1 μm) combined with large driving force (100 mN) and power-free latching.
The High Redundancy Actuator (HRA) project deals with the construction of an actuator using many redundant actuation elements.
An approach, which is currently being investigated by the researchers, is the use of a second high bandwidth actuator at the end of the conventional voice-coil actuator.
These results indicate that PISA can sever as a high efficiency actuator in structural vibration control application.
On the other hand, as for speed, human have a limitation of finger manipulation speed V limit, while a robot can easily exceed V limit by implementing a high speed actuator, as shown in Figure 11.
The positioning resolution and repeatability of the end platform is nanometer scale for the adoption of high precision actuator piezoelectric ceramics.
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