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Burr shows different variation with the grating pitch of 10 20 μm and less than 2 μm.
The grating pitch period and aperture feature size of the FWGC designed and fabricated here are 384.3 448.2 nm and 0.5×0.5-mm2, respectively.
The structural parameters for the filter were: a grating pitch of 300 nm, a grating height of 170 nm, and a 150-nm thick oxide overlay.
Furthermore, a gold-coated DLCG with grating pitch of 2 µm and pattern area of 60 mm×60 mm etched on the quartz substrate is fabricated with the proposed method.
The Bragg wavelength is related to the refractive index of the material and the grating pitch.
The depth of the Cr layer is about 27.5 nm with grating pitch at 400 nm, and the profile of grating structures is quite uniform.
Similar(43)
However, Jtot is not peaked under the same grating pitches for TE or TM (see Figure 2a,b).
The presented fabrication method will also reduce processing time and improve grating pattern quality through address grid resolution, grating direction, pitch size and shapes in the e-beam exposure.
Comparison of single-frequency grating having uniform pitch of 100 lines/mm with a grating of frequency variable from 59 to 220 lines/mm using an average pitch of 100 lines/mm over a small area as a lateral-shear interferometer have been made.
To fabricate dense, high-AR gratings, large arrays of 50- to 200-nm-pitch grating patterns were exposed at 30 keV on 300- to 330-nm-thick SML samples.
The pitches of grating patterns are 555 and 277 nm with pattern heights of 40 and 25 nm, respectively.
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