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For the field emission based gauge, the electron energies are normally higher due to the existence of high electron extraction field [16, 18, 36].
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The operating principles of this gauge are similar to the Penning gauge except that the electrons are produced by a hot filament and accelerated to a grid.
The gauge outgassing property, including the electron stimulated desorption (ESD) effect, plays a key role for the measurement accuracy and the XHV feasibility.
Hence, the "electron" in "electronics".
b Illustration of the MWNT ionization gauge with the spacing between the electron source and the anode of 2 mm Fig. 4 Emission characteristics of the electron source with the MWNT emission area of 20 mm2 and the cathode-gate spacing of 100 μm. a I-V curves under cathode-anode spacing of 2 mm and anode voltage of 430 V.
Therefore, the electron energy modulation enhances the gauge measurement sensitivity effectively.
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