For the deposition of the films, both oxygen and argon were introduced into the chamber separately through two gas mass flow controllers.
Figure 16 shows the sensor array which mainly consists of a target gas, a multi-component gas mixer, a mass flow controller unit, a testing chamber, a power supplier and heaters, and an electrometer for resistance measurement [121, 135, 136, 137, 138].
A starting powder forms an aerosol in an aerosol chamber by mixing with the carrier gas controlled by a mass flow controller, and a vibration system under the aerosol chamber helps to generate the aerosol.
The flow rate of oxygen gas was controlled by a mass flow controller.
After completion of activation, flow rate of carrier gas was controlled through a mass flow controller at 40 mL/min, an optimum rate from previous studies [19].
One end of the quartz tube was connected to a mass flow controller, which controls the flow rate of the carrier gas, argon, and the other end was connected to the exhaust.
Natural gas burner-controlled mass balance, through a mass flow controller applied to the gas duct, and energy balance, through the calculus of the energy content on the different stages, from the input gas mass flow to inside the engine and in the water external cooling circuit.
The flow of 1% H2 gas was regulated using a mass flow controller (GFC-17, 0 to 100 ml/min; AALBORG, Orangeburg, NY, USA), whereas the air flow was controlled using a mass flow meter.
Open image in new window Fig. 1 Schematic diagram of experimental system: (1 3) N2, O2, SO2 gas cylinder, (4) valve; (5) mass flow controller (MFC); (6) mixing chamber; (7) dryer; (8) thermo-bath; (9) thermal-jacket; (10) semi-batch reactor; (11) mixer; (12) gas distributor; (13) conductometer; (14) pH meter; (15) gas analyzer; (16) tail gas absorber.
Pure argon (99.999%) with 30 cm3/min flow rate controlled by a mass flow controller was used as sputtering gas, and the base pressure of the vacuum chamber is about 3 × 10-5 Pa.
