Fig. 1 a Proposed design of semiconductor gas sensor array, and b fabricated semiconductor gas sensor array.
Proposed design of gas sensor array will contribute to miniaturizing the sensor array.
Second, we discussed the temperature distribution under steady state of the integrated gas sensor array according to the variances of material properties and the array's structure.
The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO2 + SnO2 (15 wt%), SnO2, and Ga2O3] were deposited using screen printing.
Fig. 3 Sensitivity of gas sensor array.
The gas sensor array was fabricated on an Al2O3 substrate.
This approach has been extended to integrated gas sensor array.
A portable homogeneous gas sensor array is used to visualize the flow of a target gas.
Integrated gas sensor array allows the monolithic realization of multi-species gas sensing systems.
The gas sensor array has three sensing layers; SnO2 (15 wt% -doped TiO2, SnO2, and Ga2O3.
