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EUV, X-ray, EPL, and IPL all have important, but distinct, requirements for resist sensitivity.
The origin of this effect is at the surface modification by the promoter used for resist adhesion.
The different process steps include the use of a resist adhesion promoter, resist spinning, UV exposure, and a developer for resist stripping.
A similar process is also observed in the work of Mäkelä and the team [42] for thermal R2R NIL as shown in Figure 11; however, a patterned gravure roller is used for resist coating for more efficient deposition of resist, with a thickness down to 160 nm reported.
A comparison of different approaches for resist plasma removal (ashing) after dielectric-etch, over a porous spin-on methylsilsequioxane (MSQ) based dielectric material with a k value of 2.2 (here after designed as ULK, for ultra low dielectric constant) was conducted.
Similar(55)
Bieber was further charged for resisting arrest.
He also had a political motive for resisting the role.
His Spanish grandfather was shot for resisting fascism.
Americans are not known for resisting such temptations, especially if money is tight.
He was sentenced to 40 days in jail for resisting arrest.
He blamed the Syrian rebels for resisting opening talks with President Bashar al-Assad's government.
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