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The flexure stage is used to scan the sample.
For the flexure stage, it was measured with one axis fixed.
The system guidance errors for the crossed roller bearing (CRB) stage and the flexure stage were evaluated using an interferometer and a digital autocollimator.
During the printing process, capacitance probes, eddy current sensors and load cells are used to monitor the displacements of the flexure stage and contact force in real time.
The masses are 2 and 6 kg for the x and y axes of the CRB stage, respectively, while for the flexure stage, these are 16 and 20 g, respectively.
First, the fabrication and testing of a two-axis double parallelogram flexure stage is presented and the results obtained from FEA and experimental measurements are shown to be in good agreement with the analytical predictions for this stage.
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We subsequently examined planar two degree of freedom oscillators based on parallel flexure stages.
The theoretical kinematic design of flexure stages using exact constraint methods is well known.
These limitations, which become even more prominent due to non-minimum phase zeros in the context of flexure stages with non-collocated actuators and sensors, typically lead to trade-off between resolution, bandwidth and the robustness of the positioning system.
Feedback designs have demonstrated a significant improvement in the performance of the flexure-stage based positioning systems in atomic force microscopes (AFM) that provide large travels with high resolution.
The flexure-based stage comprises symmetric flexure guiding mechanism and two piezoelectric stack actuators.
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