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The proposed method offers a new look into the analysis and design of flexure based nano-stages for real applications.
Scanners are formed directly by piezoelectric components, or they are constructed as a combination of guidance systems (e. g. flexure based) and piezoelectric components.
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Analytical compliance model is vital to the flexure- based compliant mechanism in its mechanical design and motion control.
The interaction between the actuators and the flexure-based mechanism is extensively investigated based on the established model.
The displacement and stiffness calculations of such flexure-based compliant mechanisms are formulated based on the principle of virtual work and pseudo rigid body model(PRBM).
Photographs of both systems can be found in Figure3. Figure 2 Schematics of the flexure-based stage.
Three piezoelectric actuators are utilized to drive active links of the flexure-based mechanism.
Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were performed.
Piezo-actuated flexure-based precision positioning platforms have been widely used in micro/nano manipulation.
The flexure-based stage comprises symmetric flexure guiding mechanism and two piezoelectric stack actuators.
This paper proposes a new flexure-based dual-axis gripper driven by two piezoelectric actuators (PEAs).
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