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The film parameters (dielectric constant and current density) were calculated using the partial capacitance method [26].

The introduction of the squeeze film parameters results in a frequency-depended nonlinear system.

The introduction of the squeezed film parameters results in a frequency-dependent nonlinear system.

The matrix assisted pulsed laser evaporation process provides excellent control over several film parameters, including thickness, roughness, homogeneity, and reliability.

The static film parameters result from the generalized scaling procedures applied to the surface pressure-area isotherms and surface pressure temperature isochores.

Finite element simulation results of the deformation of micro-beam (using the measured NiTi thin film parameters) agree quite well with the measured behavior.

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The approach is suitable for film growth simulation and for film parameter calculations.

The mismatch in the intensity between the upper and lower segments is evaluated and used to retrieve the unknown film parameter.

In order to evaluate the mechanical properties experienced by a thin film parameter on the rigid substrate, the author proposes a semi-analytical model to estimate the deformation of the thin film under various conditions.

Metrology and inspection systems can be broadly separated into three main classifications by application: critical dimension (CD) and overlay measurements, particle and pattern defect detection, and thin film parameter measurement.

The analytical expressions of thin-film parameters are obtained based on Navier-Stokes equations with the method of approximate analytical iteration.

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