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Fig. 1 a Combination fabrication system with pulsed laser etching (PLE) and pulsed laser deposition (PLD) devices.
Fig. 1 Fabrication system with PLD device, in which the Si-Ge layer quantum system and super-lattice structures are prepared after annealing.
A silicon wafer of P-type (100) oriented substrate of 1 10 Ωcm is taken on the sample stage in the combination fabrication system with pulsed laser etching (PLE) and PLD devices, as shown in Fig. 1a.
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