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Figure 4 Snapshots during the fabrication process including membrane actuator array (a), microchannel layer before (b) and after hole punching (c), and assembled device (d).
The shape determined by location of strained layer in multi-layer structure controlled with layer design and fabrication process including selective etching technique.
As alternative technologies to conventional photovoltaic cells, polymer bulk-heterojunction [BHJ] photovoltaic cells have gained great attention since they have several advantages such as low-cost fabrication, mechanical flexibility [2, 3], and easy fabrication process including spin-coating [4].
A series of pre-structured fabrication process, including deep diffusion of boron in a high-temperature diffusion furnace, were used to obtain a 50~ 60 μm p-n junction below the final ~ 250-μm-thick device structure.
Phase modulation is obtained by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching.
An overview of the backpack fabrication process, including which assembly technique was used for each region, is shown in Figure 1.
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The fabrication process includes Through Silicon Vias (TSVs) with sealed anchors for compact flip chip integration with microelectronic signal processing circuitry.
In addition to the oblique-implant technique, the fabrication process includes a hydrogen anneal step to smooth scalloped silicon sidewalls left by the deep reactive ion etch (DRIE) process.
The overall fabrication process includes one single main process: PEC etching for forming a coherent microporous silicon membrane and decorating nanospikes in situ at the edges of fabricated microchannels by overetching.
All the fabrication processes including the final cleaning can be finished within 4 h.
All the fabrication processes including the final cleaning and self-assembled monolayer formation could be finished within 4 h.
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