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Relevant data from all included studies were extracted using a pre-defined extraction grid.
A common problem of the multi-beamlet, negative-ion based Heating Neutral Beam (HNB) Injectors presently used in fusion research, is the undesired deflection of negative ions due the permanent magnets embedded in the Extraction Grid (EG) for the suppression of the unwanted co-extracted electrons.
We have also adapted an ion extraction grid between the Cu target and substrate.
The extraction system is composed of three grids: the plasma grid, the extraction grid and the grounded grid.
The electron mobility of the poly-Si film grown on Si(100) at 400°C with ion extraction grid was 96 cm2/Vs.
The BL value of the magnetic filter is 1.6 mTm and almost all electrons are deflected onto the surface of the extraction grid.
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Eligible studies were extracted to pre-defined data extraction grids.
Using extraction grids, the ions can be directed to pass through the analyzer.
An employment of ion extraction grids in magnetron sputtering induced the increase of film density as well as transmittance and the decrease of Rms roughness.
New magnetron sputtering system, which included simply designed ion extraction grids, was developed in our laboratory in order to synthesize high density MgO films.
A qualitative content analysis [ 36] was performed to identify needs and their fulfilment using a coding manual based on the interview guides and data extraction grids.
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