The space extent of composite device operation can be calculated by all the space extents of participated device operations, i.e., σ { ( x comOp 1, y comOp 1, z comOp 1 ), …, ( x comOpm, y comOpm, z comOpm ) } = Ω ( σ { ( x op 11, y op 11, z op 11 ), …, ( x op 1 m, y op 1 m, z op 1 m ) },, … σ { ( x opk 1, y opk 1, z opk 1 ), …, ( x opkm, y opkm, z opkm ) } ) (22).
The space extent of composite device can be calculated by all the space extents of participated devices, i.e., σ { ( x cds 1, y cds 1, z cds 1 ), …, ( x cdsm, y cdsm, z cdsm ) } = Ω ( σ { ( x d 11, y d 11, z d 11 ), …, ( x d 1 m, y d 1 m, z d 1 m ) }, …, σ { ( x dk 1, y dk 1, z dk 1 ), …, ( x dkm, y dkm, z dkm ) } ) (25).
The space extent of the device operation can be calculated by all the space extents of terminal controlled by this device, i.e., s { ( x op 1, y op 1, z op 1 ), …, ( x opm, y opm, z opm ) } = O ( s { ( x ti 1, y ti 1, z ti 1 ), …, ( x tim, y tim, z tim ) }, …, s { ( x tj 1, y tj 1, z tj 1 ), …, ( x tjm, y tjm, z tjm ) } ).
The extent of IC device damage from x-ray lithography process steps is also presented.
σ{(xd 1,yd 1,…d 1), x(x d m,y d m,z d m )} denotes the spatial extent of the device.
s{(xo p 1,yo p 1,zo p 1),…, x o p m,y o p m,z o p m )} represents the spatial extent of the device operation.
σ{(xc d s 1,yc d s 1,zc d s 1),…, x c d s m,y c d s m,z c d s m )} represents the spatial extent of composite device.
σ{(xc o m O p 1,yc o m O p 1,zc o m O p 1),…, x c o m O p m, y c o m O p m,z c o m O p m )} represents the spatial extent of the device operation.
The ability is denoted as follows: comDA ( comD ) = fa ( σ { ( x comD 1, y comD 1, z comD 1 ), …, ( x comDm, y comDm, z comDm ) }, ( a 1, a 2, …, a n ) ), comDm ≥ 1, n ≥ 1 (24) σ{(xc d s 1,yc d s 1,zc d s 1),…, x c d s m,y c d s m,z c d s m )} represents the spatial extent of composite device.
