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When the gradient in chemical potential is taken as the fundamental driving force for diffusion a correction needs to be made to eqn (6).
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To find the under-etch length for the mask produced by diffusion, we introduced a correction for the increase in the n-type beam width x due to the side diffusion of phosphorus, w c = w + x (see Figure 1b), where x = 0.8x j.
Both a diffusion velocity correction, which is necessary to properly conserve mass with Fick's law, and a differential diffusion effect between the composition-space moving with the flow and fast diffusing species, are introduced.
It contains an entropic potential determined by the varying extension of the eliminated channel direction, and a correction to the diffusion constant that introduces a space dependent diffusion.
The solid mechanics equations are solved in nonconservation form, with the novel application of a diffusion-like correction to enforce the gauge condition that the deformation tensor be the gradient of a vector.
Therefore, we introduced a correction factor for a multicomponent gas system into the DGM equation, multiplying the Knudsen diffusion coefficient, which includes the obstruction factor related to tortuosity, by this correction factor.
We published a correction.
This required a correction.
"It's a correction".
CNN issued a correction.
This is a correction.
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Justyna Jupowicz-Kozak
CEO of Professional Science Editing for Scientists @ prosciediting.com