McKee, C., Culshaw, B. & Leach, R. Laser ultrasound measurement of diaphragm thickness, Young's modulus and Poisson's ration in a MEMS device.
The percent change in fractional diaphragm thickness (FDT) during inspiration reflected diaphragm shortening.
A MEMS design is introduced taking into account an optimum diaphragm thickness and a beneficial electrode structure.
The structure has a diaphragm thickness of 3 μm, a diaphragm size of 0.5 mm × 0.5 mm, and an air gap of 1.0 μm.
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity, and resonant frequency.
It is discussed as to how a high bandwidth and high sensitivity can be realized by decreasing the diaphragm thickness and applying an appropriate tension.
To investigate the effects of high-intensity inspiratory muscle training (IMT) on inspiratory muscle function (IMF), diaphragm thickness, lung function, physical work capacity (PWC), and psychosocial status in patients with cystic fibrosis (CF).
Based on the proposed design method, effects of the cavity volume, cavity radius, diaphragm thickness and diaphragm material properties on the maximal radial stress of the working diaphragm are further discussed.
Three different types of sensors, featuring a diaphragm thickness of 3 μm and diaphragm sizes of 500 μm, 700 μm, and 900 μm (square diaphragm), have been fabricated and characterized.
The objective of this study is to resolve a pressure nonlinearity problem in terms of silicon nitride residual stress and diaphragm thickness in order to meet the PNL design criteria within ±3% at 25 °C.
