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(a) Schematic diagram of simulation model for germanium plane and carbon sphere interaction; (b) simulated and fitted energy values when the distance between sphere and plane changes.

Fig. 5 Block diagram of simulation environment.

Figure 3 Block diagram of simulation tool.

The block diagram of simulation environment is shown in Fig. 5.

Open image in new window Fig. 5 Structure diagram of simulation system.

As a result, the diagram of simulation and nonlinear regression (for m = 1) in Fig. 3, are slightly different from each other.

(b) Schematic diagram of the simulation model, based on interacting point particles (EVL vertices, DCL cells) confined to move on the surface of a sphere.

A schematic diagram of the simulation model is depicted in Figure 2.

Figure 3 shows the block diagram of the simulation tool.

Fig. 1 Schematic diagram of the simulation models.

Fig. 1 Schematic diagram of exposure simulation chamber.