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However, semiconductor Flash memory scaling is far behind CMOS logic device scaling.
d A schematic illustration of an as-fabricated device (scale bar, 2 cm).
Array device scaling is determined by a chip size driven aggressive node scaling.
Further, to obtain high-density and device scaling, different kinds of device structures have been reported [14 16].
Although conventional (continuous) floating-gate memory is the major technical advancement, there are many challenges as device scaling continues [35].
New materials and device concepts are in great demand for continual (opto)electronic device scaling and performance enhancement.
Both, array transistors as well as DRAM support devices face challenges that differ essentially from high performance logic device scaling.
The problem is more serious for thinner gate oxides because its life time becomes a limiting factor in device scaling.
As operation at high frequencies is enabled by reduction in gate length, issues relating to device scaling are discussed.
SoCs are made possible thanks to the MOS device scaling encountered in the last decades as described in Moore's Law.
This discrepancy highlights the importance of conducting site resource assessments based on measurements at the tidal energy converter device scale.
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