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This device quality factor (Q)–voltage response is ~104.
At 18 GHz, device quality factor rose from 0.5 to 6, and at 50 GHz, maximum available gain was increased by 49%.
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The proposed re-adjustment process, suitable for fabrications with a variety of design CMOS-MEMS integrated process flexibilities, has the potential to fabricate integrated devices (high quality factor variable capacitors, micromirror arrays and multi-axis gyroscopes etc.).
Two specific properties of such devices are high quality factor (Q-factor) and small modal volume (V).
To understand the large difference in enhancement of device performance, a dimensionless quality factor Q LSPR defined as the ratio of the enhanced localized field around the NP and the incident field was derived and calculated for the NS and NR [56].
Measurements of mesoscale proof-of-concept devices indicate an inductance boost of up to three orders of magnitude compared to static electrical devices, with maximum inductive quality factor up to 7.4.
In this work we identify threading dislocations (TDs) as a major limitation to the fabrication of high quality factor devices in the nitrides.
In previous work, statistical analysis of a score of microdisk devices found an anticorrelation between the quality factor (Q) of those devices and the overall dislocation density of the material composing the sample.
It was found that both quality factor and device efficiency are maximized when top electrode width is the same as that of membrane width.
Several of the most critical factors to device quality rose to the top: 1) Build orientation and location can affect final device performance.
A circuit including a microbridge resonator has been implemented to increase the quality factor of the device.
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