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In a deposition running hundreds of pages, William Fitzsimmons — a legendary Harvard hockey goalie, Class of '67, who has been Harvard's admissions dean since 1986 — offered a rare look into the admissions office.
The thickness of the CaP coating deposited on the mirror-polished Si substrate in the same deposition run with TiO2 NTs was determined by optical ellipsometry (SE) 95±± 5 nm.
Films coming from the same deposition run were annealed in air at 200 and 300 °C.
More than 150 individual samples spanning a range of thicknesses and interface conditions were prepared in a single deposition run.
The target sputter cleaning times (e.g. after a reactive deposition run) are long (compared to DC sputtering) due to the same reason.
RF-magnetron sputtering of the HA target in a single deposition run was performed to prepare a coating on the surface of TiO2 NTs prepared at 30 and 60 V.
Combining this in-situ tunable CNT growth technique with electron beam induced deposition of catalyst patterns, we have fabricated a bent CNT on a cantilever in one single, continuous deposition run.
Due to the parallel data collection and the high X-ray flux of a synchrotron radiation source, the measurement time of an EDXRD spectrum was only approximately 30 s, allowing the collection of 10 20 spectra during a deposition run.
After a motivation before the background of recent challenges in optical coating technologies and their application, an introduction will be given into implementations of optical broad band monitoring concepts as well as related instruments to simulate deposition processes and to detect errors during a deposition run.
The deposition time was 250 min for each deposition run.
For optical experiments, the layers were grown on standard p-type (100) Si wafers in the same deposition run.
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