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Nodule size varied from 1 to 5 μm depending on deposition potential and deposit thickness.
c Absorption intensities at the maximum SPR (351 359 nm) peaks depending on deposition number.
Films were characterized as either monoclinic or mixed monoclinic and cubic phase depending on deposition parameters.
The carbon matrix was amorphous, or graphite-like depending on deposition temperature.
The film system shows hardness values from 5 to 20 GPa, depending on deposition conditions.
Atomic force microscopy (AFM) analysis revealed a dome-rounded structure with columnar grain sizes between 90 and 120 nm in diameter, depending on deposition process parameters.
Similar(49)
Morphology of the deposit depends on deposition time.
The texture is also found to depend on deposition time.
The effect depends on deposition temperature and deposition geometry.
Also, this results in the low W content in the Cu-W coatings (< 6 at.%) that strongly depends on deposition potential and bath temperature.
The intermetal dielectric low k material used in the described structures has 2.1≤k≤2.3 (k depends on deposition process parameters [Microelectron. Eng. 50 (2000) 7 14]) and the copper was deposited by a metal organic chemical vapor deposition process.
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