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The (111) peak center shifts to a larger angle, and the full width at half maximum of the (111) peak decreases greatly, indicating a considerable decrease of defect density in the films.
But the improvement on thickness uniformity and the decrease of defect density of the films deposited by PEALD need further research.
As shown in Figure 3c, the RTP annealing at 500°C is accompanied by an increase of the blue and UV emission between 360 and 450 nm and a decrease of defect emissions at higher wavelengths.
When the core of nanocrystal cover by inorganic materials with higher band gap, because of quantum confinement effect (Burda et al. 2005), eliminating of trap, development of dangling bond, and astonishingly decrease of defect in the surface of core, the optical characterizations of QDs are improved (Fig. 5b, c, and d) and is shown in Table 3.
All treated cases showed the decrease of defect depth from the first infiltration, sometimes the complete resolution of wrinkles.
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These improvements include an enhancement of mobility, and a decrease of defects, unintentional doping, contact resistance, and sheet resistance.
On Si(111), the band at 2083 cm− 1 continuously grew and was sharpened by the formation of monohydride on the ideal Si(111) with the decrease of defects.
This phenomenon can be attributed to the decrease of defects and dangling bonds near the interface during the RTA process [28, 29].
It can be clearly seen from Figure 1b that the D-band becomes weaker as temperature increases, which indicates a decrease of defects with an increasing temperature.
Variation was, however, detected in the decrease of defects developing between different joints, and between different regions within joints.
The result can be explained by the change of the defect type as well as the decrease of the defect level related to growth time.
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CEO of Professional Science Editing for Scientists @ prosciediting.com