Mirror flats were present in the coating chamber and coated with iridium at the same time as the HRMA mirror elements.
Coatings deposited at the far corners of the coating chamber revealed a fiber texture with 〈111〉 column growth direction.
A custom target consisting of a CrAl half and a MoS2 half in form of triangles was used, which leads to a variation of the chemical composition of the deposited coatings dependent on the substrate position within the coating chamber.
The cold trap is cooled to between -90º and -120º C by liquid nitrogen and is responsible for removing all residual parylene materials pulled through the coating chamber.
The humidified gas flow is then split into two separate flows; a suspending gas flow and a protecting gas flow for the inside of the coating chamber.
The unidirectional LAFAD dual-arc vapor plasma source yields 100% ionized metal vapor plasma flow and more than 50% ionized gaseous plasma in the coating chamber.
In this study we investigated shape and value of ion current by measurement using round probes in the coating chamber with three simultaneously operating cathodes.
The coating chamber consists of two parts, a confined space where the particle is levitated and a droplet insertion cone where the coating solution is injected into the particle suspending gas flow.
The device consists of a coating chamber, which contains a capillary tube for levitating the particle, a micro-dispenser for producing discrete drops of controlled size and velocity and a device for supplying gas with specified temperature and humidity.
Fast Fourier Transform (FFT) analysis of the raw signal obtained at four heights and three different radial distances from the draft tube centerline was performed for experiments in a conventional and a swirl Wurster coating chamber at different process parameters.
