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In this study, two kinds of in situ dry cleaning approaches, called saturation and low etch rate (LER) modes, have been evaluated to further reduce Rc and prevent the contact to poly short issue as keeping contact size scaling down to 28 nm node.
Nominally, peak concentrations were best mitigated by the high efficiency in-duct device (86 ng/m), although the difference in comparison to peaks associated with the other air cleaning approaches (approximately 100 ng/m) may not be substantive relative to uncertainties in the modeling analysis.
Similar(58)
The solenoidal constraint is handled by a hyperbolic divergence cleaning approach allowing its satisfaction up to machine accuracy.
The fish-powered cleaning approach isn't feasible everywhere, says Ken Nedimyer, founder and president of the Coral Restoration Foundation, which raises and transplants corals in the Caribbean and the Florida Keys.
In this study, we propose an in situ dry cleaning approach by an immediate O2 plasma strip after SiO2 etch in the reaction chamber.
Recent innovations in coal preparation have increased the efficiency and capacity of individual unit operations while reinforcing the standard parallel cleaning approach.
Specifically, our laser cleaning approach using a visible laser from Raman system provides a unique benefit of real-time in situ Raman study of the effects of laser cleaning on graphene surface.
The measured responses of the harvesters from the tests are presented and the use the harvesters for the purposes of structural health monitoring (SHM) is investigated using empirical mode decomposition analysis, following a bespoke data cleaning approach.
The key variable of interest is the change in cleaning approach.
In general, a conservative data cleaning approach is recommended i.e. to change as little as possible.
The cleaning approach is dependent on the material of the mortar and pestle.
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