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mean surface roughness (Ra: center line average roughness) and material removal rate (MRR) of machined surface are measured for each experimental runs.
The roughness of a 2 μm × 2 μm etched p-Si(0 0 1) surface was measured to be 0.1228 nm Ra (center line average roughness) by AFM.
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The center line average surface roughness of the specimen were measured with 0.8-mm cutoff length.
A number of surface roughness parameters, viz., the center line average (CLA, Ra) and root mean square (RMS, Rq) roughness, maximum mean peak-to-valley height (Rtm), maximum mean peak height (Rpm), maximum mean depth (Rvm), and average asperity slope (Δa) were calculated.
The surface roughness can be represented by center line average (R a) and root-mean-square average (RMS) [15] in the following forms: (1) (2).
From the profile ordinate data read at 1 μm intervals, a number of surface roughness parameters – centre line average, root-mean-square roughness, maximum height, maximum mean peak height, maximum mean depth, and absolute average asperity slope were calculated using a computer program.
a c The profile lines indicate average roughness (Ra) which is two-dimensional.
Average roughness (Ra)—the arithmetic average of a deviationy, from the center line is: Root-mean-square roughness (Rrms) is the root-mean-square deviation from center line: For each sample, the rms roughness and average roughness as defined in [21] were evaluated.
For example, its analysis functions include to profile tracer and region, line measurement of height, line profile, power spectrum, line histogram, regional measurement of height, average roughness, volume, surface area, histogram, bearing ratio, and grain analysis functions.
Ra is defined as the arithmetic average deviation of the absolute values of the roughness profile from the mean line or the center line.
(c) Arithmetic mean roughness (R a ): the average roughness or deviation of all points from a plane (centre line) fitted to the test surface (Fig. 2).
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