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HCC helped to deliver the idea for deposition of sensing membrane by using electron beam evaporation.
The samples were fabricated by using electron beam lithography through a lift-off technique.
The multilayer stack had been fabricated by using electron beam gun evaporation system in Symphony 9 vacuum coating unit.
CS colloidal gel in 1% acetic acid can be changed to homogeneous solution by using electron beam irradiation (EBI).
NOx removal contained in off-gases was studied by using electron beam generated plasma.
A 5-nm Al buffer layer and a 3-nm catalytic Fe film were then deposited on the substrates by using electron beam evaporation.
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Coulomb and Mott scattering measurements can be made by using electron beams as scattering probes, and similarly, positron annihilation can be used as an indirect measurement of local electron density.
Previous studies on the SAE of InGaN QDs have been pursued by using electron-beam lithography [58 61], and anodized aluminum oxide (AAO) template [62].
Ni was deposited by using electron-beam evaporator (Angstrom Engineering, Kitchener, Ontario, Canada) at 1 Å/s rate under < 7 × 10−7 Torr chamber pressure.
The patterning of the structure and the membrane release were achieved by using electron-beam lithography, reaction ion etching, inductively coupled plasma etching and selective wet etching.
In the plane photonic confinement effects are obtained by microfabrication techniques using electron beam lithography and dry etching.
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