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The increase of RRMS may be explained by the sputtering effect but it may be linked to the presence of a buried oxi-nitride phase grown by diffusion at higher temperature.
Though the low laser fluence and high deposition pressure are adopted, the structure of graphene will also inevitably be affected by the sputtering effect, especially at the early growth stage of BMN film.
The former can be explained by the sputtering effect due to the ion bombardment, while the latter may be related to the redistribution of material into valleys by eroding surface roughness peaks and ion bombardment enhancing the surface diffusion mechanism, which occurs at high doses [7].
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Another important phenomenon is the sputtering effect.
This fact indicates the graphene structure was only slightly affected by sputtering effect of LMBE.
Low-energy bombarding effects and sputtering effects produced by the cluster ion impact are particularly important.
This pump makes use of the sputtering principle, in which a cathode material such as titanium is vaporized or sputtered by bombardment with high-velocity ions.
Song et al. presented the effects of a seed layer prepared by the sputtering method on the growth of ZnO NRs [17].
"It's kind of a sputtering effect.
This research focused on the surface-enhanced Raman scattering (SERS) effect of the thickness of the deposited Fe film which was controlled by the sputtering time.
The material discs were coated with a layer of gold by the sputter coating machine (BAL-TEC, Germany).
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