Sentence examples for by a surface micromachining from inspiring English sources

Fabrications of the microbolometer are carried out by a surface micromachining method.

The micromirror prototype has been fabricated by a surface micromachining process and it is successfully tested using a microsystem analyzer.

The sensors have been fabricated by a surface micromachining process where SiC is chosen as the structural layer to sustain various high temperature environment conditions.

We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release Al 1%Si membranes and has a low thermal budget (<450 °C) being compatible with CMOS post-processing.

The SAW radio transponder and touch-mode sensor are fabricated using a surface micromachining and a bulk micromachining technologies, respectively.

To form the windings, we have used a surface micromachining process.

We present arrays of electrostatically actuated piston-tip-tilt micromirrors realized using a surface micromachining 3-structural-layer polysilicon process.

The design and CMOS-compatible fabrication of airgap-based optical filters in a surface micromachining process with sacrificial release using thevapour phase is presented.

The analytical model was tested experimentally by examining the levitation and translation positions of a surface micromachine under both compensated and uncompensated signals.

It is based on a surface micromachined poly-SiGe thermopile.

The encapsulation structure consists of a multilayer wall around the actuator and a surface micromachined polysilicon cap.