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Various MEMS devices like Accelerometers, Resonators, RF- Filters, Micropumps, Microvalves, Microdispensers and Microthrusters are produced by removing the bulk of the substrate materials.
The observed behavior of the spectral response indicates that our gettering process leads to an efficient surface and bulk passivation and indicates an extended effect deep into the bulk of the substrate, which we suggest to be considered especially at the grain boundaries.
The waveguide is fabricated in the bulk of the substrate (buried at a depth of 50 µm from the surface) using femtosecond laser pulses that locally increase the refractive index of fused silica [ 7].
In earlier work [ 8] it was suggested that amorphogenesis primarily resulted from substrate changes such as cellulose delamination or fibrillation, where relatively large, intact fragments, still containing crystalline regions, are released from the bulk of the substrate.
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The process analyses results were promising with a reduction of 56.5% of volume, and an increase of 52% of bulk density of the substrate at the end of 33 days of biodrying.
The high costs of these processes are, in part, because of the limited knowledge of the bulk structure of the substrate itself and the influence of pretreatment processes on the accessibility of the β-glycosidic bonds in cellulose to cellulase enzymes.
Neutron reflectometry (NR) has also been applied to differentiate between cellulases that are more active at the surface of an amorphous cellulose film and those that are active in the bulk of the same substrate [ 20, 28].
As the enhanced activity requires physical tethering of the two domains, we suggest that the binding affinity of the CBM also still plays a role, providing the fused CD substantial time to access the newly available sites in the bulk of the cellulose substrate.
Between 1850 and 1900 K a rapid rise is observed, indicating the transition from the high-coverage R(15 × 3) to the low-coverage R(15 × 12) phase with rapid dissolution of the excess surface carbon into the bulk of the tungsten substrate [5,8,18,19].
Bending strength improvement by surface nanostructures has no effect on bulk properties of the substrates, and higher strength is achievable without changing the current manufacturing process.
Recent work has shown that the bioactive properties of titanium implants can be improved selectively by immobilization of the appropriate bioactive molecules, while the desirable bulk attributes of the substrates are retained.
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