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Xiong et al. believed that oxygen vacancies were the reason of the tensile stress [10], while Zeng et al. attributed the tensile stress to the more a-axis grains and the bigger surface roughness value with increasing thickness of the film [11].
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The relatively big surface roughness resulted from the high-density ITO crystalline grains which are small white particles shown in Figure 2a.
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Kirk-Davidoff, D. B. & Keith, D. W. On the climate impact of surface roughness anomalies.
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