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However, the multiple interactions between the processing steps greatly increase the difficulty in the accurate design of such processes.
GensearchNGS performs the required data file handling and conversions between the processing steps.
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The processing steps were as follows.
The processing steps used in the fabrication were the conventional steps used in standard GaAs processing.
Figure 4 illustrates the processing steps.
Fig. 3 Schematic of the processing steps.
The processing steps are as follows.
The following paragraphs will explain the processing steps further.
The processing steps were performed according to the following protocol.
The processing steps are sequentially explained in the following subsections.
The processing steps were performed as previously described [12].
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